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Solar Cell Case Study |
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Plan View of Solar Cell Structure |
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Non-Contact 3D Surface Profiler |
Applications
- Flatness, surface roughness, step height, deformation and waviness
- 2-D and 3-D profile
Advantages
- Accurate, fast and no sample preparation is needed
- An extremely wide range of surface heights is capable to be profiled. (~180μm)
- The benefits of optical surface profilometry include
- Excellent height resolution
- High measurement speed
- Ability to perform non-contact measurements of delicate surfaces
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Surface defects characterization
(a)OP (b)SEM (c)Metal fingers formation on FPC (d)Photo mask inspection
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Surface Texturing (Morphology) |
Nano View (Optical Profiler)：quantitative characterization of surface roughness
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Surface Texturing (Morphology, Roughness) |
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Cell Structure |
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Front Side Surface Texturing |
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Back Side Al BSF |
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SEM – BSF Staining |
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SEM – Emitter Junction Staining |
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Substrate Pin Hole |
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(a)FIB 圖像；(b)SEM 圖像
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FIB Cutting of Substrate Pin Hole |
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Substrate Pin Hole (X-TEM) |
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Substrate Pin Hole |
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Cross-sectional TEM
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Defect Localization by EMMI |
- Leakage (Junction/Oxide)：
- Leakage at Oxide (Low Temp.)
- Latch-up etc. - Hot Electrons (Bulk)
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EL Image of Multi– Si Solar Cell |
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Si Solar Cell FA by EMMI Analysis |
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Si Solar Cell FA by EMMI & TEM |
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SIMS Applications |
- Ultra-shallow junction analysis
- Very thin layer (tens angstrom) analysis
- Doping profile/Depth profile
- Back side Cu Diffusion
- Contamination verification
- Excellent detection limit (ppm to ppb)
- Can detect all elements and isotopes, including H
- Excellent depth resolution, 1nm is possible
- Quantification by standard reference
- Insulator can be measured
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 (a) CAMECA ims-6f，High Transmission and High Mass Resolution； (b) ATOMIKA sims 4500，High Depth Resolution, Ultra-Shallow Junction |
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SIMS Analysis for Si Solar Cell |
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