About

MA-tek is the worldwide leading analytical lab providing comprehensive and high-quality services.

Services

We provide wide span of materials, structure analysis, surface analysis, failure analysis, and reliability test.

Applications

We provide analytical consulting and technical support to high-tech industries, semiconductor manufacturing to system integration.

Tech Article

As the best R&D partners, we are willing to share our new insights and technical details with you.

Investors

All of the financial information are open and transparent to our shareholders.

Career

Aim to work as a medical center for high-tech industries, MA-tek welcome talents with professional background to join us.

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MA-tek had been certificated by ISO 9001, 27001, 17025, 15408 and ESD20.20. You are welcome to download the certificates for reference.

Materials Analysis (MA)

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EELS

Technical Concept

Electron Energy Loss Spectroscopy（EELS）equipped on TEM is a powerful technology to analyze the composition of the elements.

The energy resolution of EELS is 1eV or less. By coupling with the functions of TEM, the spatial resolution can be better than 1nm. So EEELS/TEM became one of the popular technology for composition analysis.

(a) 300KV Tita

(b) Gatan 965 EELS

Filtered imaging of EELS was used to analyze layer’s structure of the low-k materials.

Near the edge, fine structures of EELS were used to analyze the chemical state of the oxygen in different materials of the 16nm high-k materials.

EELS line-scanning analysis was used to inspect the processes of 16nm Low-k materials.

Contact

Taiwan Lab

Mr. Hsu

: +886-3-6116678 ext：4503

: +886-970-025 296

: rd@ma-tek.com

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Materials Analysis (MA)

SEM

TEM

FIB

DB P-FIB

EBSD

EELS

EELS