α-step
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Technical Concept |
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The alpha-step uses a diamond-made sharp probe to scan the surface of objects in order to obtain their surface morphology. |
The variation of height during scanning is detected and recorded with a conductive sensor. With this, surface morphology and roughness can be obtained.
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Application |
- One-dimensional surface morphology measurement
- Thin film thickness determination
- Depth analysis
- One-dimensional roughness analysis
- The maximum sample size for measurement: 200 mm (8” wafer)
- Maximum measurement length: 55 mm and maximum Z-range: 1.2 mm
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Equipment |
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Bruker
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Application Case |
 Thin film thickness measurement |
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 1D surface roughness analysis |
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Contact |
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