SAT
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Technical Concept |
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Scanning Acoustic Tomography (SAT), also called scanning acoustic microscope (SAM) is used to examine IC structure supersonically with a frequency higher than 20 KHz. |
Supersonic waves generated from a probe vertically propagate to the sample of interest via the intermedium (pure water) and then penetrate into a sample with a certain depth. These waves are partially reflected when they meet an interface between two different materials and structures. Reflected signals are used to construct sample 3D structures at any local embedded architecture of interest.
Probes are selected based on materials and thickness of samples and their generated supersonic can be varied from 15 to 230 MHz. The penetration depth for the epoxy package is about 4 mm. The application of SAT/SAM includes high-end IC products, such as microelectronics, LEDs, MEMS, power modules, high-tech devices, etc.
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Equipment |
Hitachi FS300II |
Sonoscan GEN6 |
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Applications |
The applications of SAT/SAM includes：
- Package crack
- Delamination
- Die crack
- Epoxy void
- Bad die adhesive
- Bad soldering
- Bad metal via contact
Our SAT/SAM can produce in-situ 3D images of ROI with a height resolution of 0.5 micrometers and a scan speed of 1000 mm/s. Scanning mode includes A-scan, B-scan, C-scan, S-image, and T-scan.
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