Thin Film Analyzer
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Technical Concept |
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The thin film analyzer is a non-contact analysis technology that uses a light source to vertically shine onto the sample and detect the reflection spectra. |
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Application |
- Thin film thickness measurement
- Multi-layer thin films thickness measurement
- Can be also applied to thickness measurement on dielectric, oxide, metal, organic, and inorganic thin films
- Minimum measurement dimension: 10 um
- Measurement range: 20 nm to 20 um
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Equipment |
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Filmetrics F40
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Application Case |
 Single thin film thickness measurement, SiO2: 316.38 nm |
 Multi-layer thin film thickness measurement, Si: 614.2 nm/W: 54.63 nm/Si3N4: 122.4 nm |
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Contact |
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