EBIC / EBAC
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EBIC (Electron Beam Induced Current) |
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EBIC is a method for imaging and characterization of p-n junctions, junction defects, and diffusion length. |
When an electron beam strikes a semiconductor, electro-hole pairs are generated and separated in the depletion region due to the built-in electric field, and a current flow can be measured.
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EBAC (Electron Beam Absorbed Current) |
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EBAC offers a quick and effective method to identify interconnect opens and shorts. |
EBAC utilizes the electron beam to penetrate the dielectric layers and inject charges inside the sample. The absorbed charges by the lower level metallization layer (3 or 4 layers deep) are measured by the current amplification through the probing probe.
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Contact |
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