OM
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Technical Concept |
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Optical Microscopy（OM）is used to display the surface morphology of samples by 2D intensity contrast due to deflection and reflection of visible light shined on areas of interest. |
Its resolution is about half of the incident wavelength, which is ~0.2 μm for visible light (wavelength of 400-700 nm). Such resolution limits the maximum magnification to X1000, and thus optical microscopy provides preliminary inspection of sample surface structure.
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Equipment |
 (a) 50-1000X (b) 100-500X / 40-200X / 5-75X (c)50-1000X |
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Applications |
The application of optical microscopy includes：
- IC cross-section observation
- Delayer structure analysis and observation
- Precipitate free zone observation
- Dislocation and over-etch observation
- Oxidation enhanced stacking faults research
 (a) Metal (b) Poly (c) OD/AA |
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