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AFM
Technical Concept |
Atomic Force Microscope (AFM) uses a sharp tip/probe mounted on a cantilever to scan the sample surface to sense surface electronic and magnetic properties. |
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Application |
- <100um surface morphology
- Roughness analysis
- Local dimension and height measurements
- 3D image analysis
- Thin film surface structure or defect analysis, maximum sample size: 12” wafer
Equipment |
AFM (Bruker ICON)
Application Case |
(a) Surface roughness analysis |
(b) 3D image |
Section Analysis |
Contact |
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