其他應用 FLASH, LOGIC, POWER, SiGe |
TEM Analysis of ICs |
(a)50 nm Gate Structure;(b)Ultra-thin Gate Dielectrics;(c)Via Structure |
TEM/HAADF image of Silicide
(a) TEM;(b) HAADF |
TEM Analysis of SiGe |
High Resolution TEM Imaging
TEM Analysis of SRAM |
Total delayer to expose the bare Si substrate
(a) Plan-view TEM;(b) Plan-view TEM |
Dislocation in SRAM cell array
TEM Analysis of DRAM |
HSG structure
Capacitor aspect ratio = 1.98/0.24= 8.25 |
|