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Thin Film Analyzer
方式 |
The thin film analyzer is a non-contact analysis technology that uses a light source to vertically shine onto the sample and detect the reflection spectra. |
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保有装置 |
Filmetrics F40
応用 |
- 薄膜の膜厚測定
- 多層薄膜の膜厚測定
- 誘電体、酸化物、金属、有機、無機薄膜の膜厚測定にも応用可能
- 最小測定寸法:10um
- 測定範囲:20nm~20um
単一薄膜の膜厚測定,SiO2: 316.38 nm |
多層薄膜の膜厚測定,Si: 614.2 nm/W: 54.63 nm/Si3N4: 122.4 nm |
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